Synchrotron radiation sources and condensers for projection x-ray lithography.

Applied optics

PubMedID: 20856546

Murphy JB, White DL, MacDowell AA, Wood Ii OR. Synchrotron radiation sources and condensers for projection x-ray lithography. Appl Opt. 1993;32(34):6920-9.
The design requirements for a compact electron storage ring that could be used as a soft-x-ray source for projection lithography are discussed. The design concepts of the x-ray optics that are required for collecting and conditioning the radiation in divergence, uniformity, and direction to illuminate the mask correctly and the particular x-ray projection camera used are discussed. Preliminary designs for an entire soft-x-ray projection lithography system that uses an electron storage ring as a soft-x-ray source are presented. It is shown that, by combining the existing technology of storage rings with large collection angle condensers, a powerful and reliable source of 130-A photons for production line projection x-ray lithography is possible.