The spatial distribution and resolution of coaxial backscattered electrons in SEM, calculated by monte carlo simulations

Journal of microscopy

PubMedID: 10781205

Jiang CZ, Rosenberg N, Morin P. The spatial distribution and resolution of coaxial backscattered electrons in SEM, calculated by monte carlo simulations. J Microsc. 2000;198 (Pt 1)17-23.
We simulate, within a sample, the trajectories of the backscattered electrons detected in a scanning electron microscopy with a particular detection geometry. Thus we obtain the depth and lateral distributions, according to the adjustable parameter values, of the detected electrons. Finally, the scanline profile across a chemical edge is drawn. The conditions corresponding to the best lateral resolution are established; we obtain an ultimate resolution of the same order as the beam diameter.